COA SUBSTRATE, METHOD FOR FABRICATING THE SAME AND DISPLAY DEVICE

摘要

A COA substrate and its fabrication method as well as a display device are disclosed. The method includes steps of: forming a TFT (10) on a base substrate (1); forming a color film layer (6) pattern on the base substrate (1) having the TFT (10) formed thereon; forming a pattern which includes a color film via hole (5) on the color film layer (6) through a patterning process, the patterning process includes an ashing process; and forming a pattern comprising a pixel electrode (7) on the base substrate (1). The pixel electrode (7) is electrically connected to a drain electrode (12) of the TFT (10) by way of the color film via hole (5).

主权项

1. A method for fabricating a COA substrate, comprising:
forming a TFT on a base substrate; forming a pattern of a color film layer on the base substrate having the TFT formed thereon; forming a pattern which comprises a color film via hole on the color film layer through a patterning process, the patterning process comprising an ashing process; forming a pattern comprising a pixel electrode on the base substrate, the pixel electrode being electrically connected to a drain electrode of the TFT by way of the color film via hole.