A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers.
申请公布号
WO2015183534(A1)
申请公布日期
2015.12.03
申请号
WO2015US30158
申请日期
2015.05.11
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
BERGERON, PHILLIP J.;LUNCEFORD, BRENT D.;GEISSINGER, JOHN D.;GUNDEL, DOUGLAS B.;MOONEY, JUSTINE A.;PALANISWAMY, RAVI;FOO, SIANG SIN
