| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which is improved in breakdown voltage characteristics having a PZT piezoelectric layer formed using an arc-discharged reactive ion-plating (ADRIP) method.SOLUTION: A piezoelectric actuator has a capacitor structure and is formed by laminating a single crystal silicon substrate 1, a silicon oxide layer 2, a Ti adhesion layer 3, Pt lower electrode layers 4, PZT piezoelectric layer 5A-1, 5B', 5A-2 and a Pt upper electrode layer 6. Zr/(Zr+Ti) composition ratio x of the PZT piezoelectric layer 5B' inserted between PZT piezoelectric layer 5A-1, 5A-2 is larger than the Zr/(Zr+Ti) composition ratio x of the PZT piezoelectric layer 5A-1, 5A-2. |
