发明名称 ANNULAR FRAME
摘要 PROBLEM TO BE SOLVED: To provide an annular frame capable of preventing retention of cutting liquid.SOLUTION: Disclosed is an annular frame (1) in which a workpiece (11) is held in an opening via a dicing tape (21) stuck so as to close the opening. This frame includes; a first surface (1b); a second surface (1a) on the side opposite to the first surface; and an inner peripheral surface (1c) which connects the first surface and the second surface and constitutes the opening. The inner peripheral surface is inclined to the second surface so that a diameter of the opening is reduced toward the second surface from the first surface.
申请公布号 JP2015216161(A) 申请公布日期 2015.12.03
申请号 JP20140096706 申请日期 2014.05.08
申请人 DISCO ABRASIVE SYST LTD 发明人 OTANI HIDEAKI
分类号 H01L21/301 主分类号 H01L21/301
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