| 发明名称 |
Carbon Nanotube-Graphene Hybrid Transparent Conductor and Field Effect Transistor |
| 摘要 |
A nanotube-graphene hybrid film and method for forming a cleaned nanotube-graphene hybrid film. A method includes depositing nanotube film over a metal foil to produce a layer of nanotube film, placing the metal foil with as-deposited nanotube film in a chemical vapor deposition furnace to grow graphene on the nanotube film to form a nanotube-graphene hybrid film, and transferring the nanotube-graphene hybrid film over a substrate. |
| 申请公布号 |
US2015349264(A1) |
申请公布日期 |
2015.12.03 |
| 申请号 |
US201514820028 |
申请日期 |
2015.08.06 |
| 申请人 |
International Business Machines Corporation ;Egypt Nanotechnology Center |
发明人 |
Bol Ageeth A.;Chandra Bhupesh;Kasry Amal;Maarouf Ahmed;Martyna Glenn J.;Tulevski George S. |
| 分类号 |
H01L51/00;H01L51/05;C23C16/26 |
主分类号 |
H01L51/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for forming a nanotube-graphene hybrid film on a substrate, comprising:
depositing nanotube film over a metal foil to produce a layer of nanotube film; placing the metal foil with as-deposited nanotube film in a chemical vapor deposition furnace to grow graphene on the nanotube film to form a nanotube-graphene hybrid film; and transferring the nanotube-graphene hybrid film over a substrate. |
| 地址 |
Armonk NY US |
