Apparatus and Method for Spectroscopic Analysis of Residue

摘要

One example of the present disclosure relates to an apparatus for spectroscopic analysis of residue. The apparatus includes a surface including a hydrophobic portion and a hydrophilic portion. The hydrophobic portion surrounds the hydrophilic portion. The hydrophilic portion includes a dimension equal to or larger than a width of a first incident non-destructive electromagnetic beam.

主权项

1. An apparatus for spectroscopic analysis of residue, the apparatus comprising:
a surface comprising a hydrophobic portion and a hydrophilic portion, wherein:
the hydrophobic portion surrounds the hydrophilic portion, andthe hydrophilic portion comprises a dimension equal to or larger than a width of a first incident non-destructive electromagnetic beam.