DISPLACEMENT SENSOR AND DISPLACEMENT DETECTION METHOD

摘要

In a linear displacement sensor, two magnets with different polarities define one pitch of a magnetic scale. kn (k is a natural number greater than or equal to 2, n is a natural number greater than or equal to 1) sensor units configured to output a plurality of signals whose period is one pitch and whose phases with respect to the pitch are different are arranged along the magnetic scale in a one-pitch segment. Periodic errors with n periods per pitch of the sensor units are canceled out by averaging the phases from the kn sensor units.