发明名称 LASER MACHINING DEVICE AND LASER MACHINING METHOD
摘要 This laser machining device (300) is provided with a laser light source (202) that emits laser light (L), focusing optics (204) that focus said laser light (L) onto a workpiece (1), a reflective spatial light modulator (203), and a light-blocking part (220). The reflective spatial light modulator (203) modulates the laser light (L) such that: said laser light (L) is split into ±nth-order light (n being a natural number) and zeroth-order light, including first machining light and second machining light, at least; the first machining light is focused onto a first focal point; and the second machining light is focused onto a second focal point. Of the ±nth-order light and the zeroth-order light focused onto the workpiece (1), the light-blocking part (220) blocks light that would be focused outside the first machining light and the second machining light.
申请公布号 WO2015182238(A1) 申请公布日期 2015.12.03
申请号 WO2015JP60006 申请日期 2015.03.30
申请人 HAMAMATSU PHOTONICS K.K. 发明人 SAKAMOTO TAKESHI;IGASAKI YASUNORI;MATSUNAGA MAMIKO
分类号 B23K26/53;B23K26/066;B23K26/067;H01L21/301 主分类号 B23K26/53
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