| 摘要 |
PROBLEM TO BE SOLVED: To provide an In-Sn-Zn oxide-based sintered body which is suppressed in non-sputtering during sputtering and reduced in cracking.SOLUTION: An oxide sintered body contains In, Sn, Zn and one or more elements X selected from Hf, Zr, Ti, Y, Nb, Ta, W, Mo and Sm, is composed of one or more phase selected from an InOphase, a spinel phase, a XSnOphase and a ZnXOand has a value of resistance of 2-50 m&OHgr;cm. |
