POLISHING APPARATUS

摘要

A polishing apparatus includes: a polishing table 12 for holding a polishing pad; a first electric motor 14 that rotationally drives the polishing table 12; a first rotary joint 40 that has a rotating body 41 that is rotationally driven by the first electric motor 14, a housing 42 provided around the rotating body 41, and a seal portion 44 that seals between the rotating body 41 and the housing 42; a second current sensor 31 that detects a current which is correlated with driving load of the first electric motor 14; a friction detecting unit 50 that detects sliding friction in the seal portion 44 of the first rotary joint 40; and an end point detecting apparatus 60 that detects a polishing end point of the polishing target on the basis of the current and the sliding friction.

主权项

1. A polishing apparatus comprising:
a polishing table for holding a polishing pad for polishing a polishing target; a first driving unit that rotationally drives the polishing table; a first rotary joint that has a rotating body that is rotationally driven by the first driving unit, a housing provided around the rotating body, and a seal portion that seals between the rotating body and the housing; a current detecting unit that detects a current which is correlated with driving load of the first driving unit; a friction detecting unit that detects sliding friction in the seal portion of the first rotary joint; and an end point detecting apparatus that detects a polishing end point of the polishing target on the basis of the current detected by the current detecting unit and the sliding friction detected by the friction detecting unit.