SUPPORT FRAME FOR PELLICLES

摘要

A support frame (1A) for pellicles, which has a frame body (10) that is formed of an aluminum alloy, and wherein a pellicle film is bonded to the front surface (10a) of the frame body (10) and a glass substrate is bonded to the back surface of the frame body (10). The front surface (10a) of the frame body (10) is provided with front-side recessed grooves (31-33) that extend in the circumferential direction of the frame body (10), and is also provided with front-side suction holes (50) that extend from the outer peripheral surface (10c) of the frame body (10) to the inner surfaces of the front-side recessed grooves (31-33). Due to this configuration, the pellicle film is able to be bonded to the frame body (10) without pressing another member against the pellicle film.