| 摘要 |
The present invention is a tension control device provided with: a pressing member (1) which presses, in a noncontact manner, an object (W), to which tension is to be applied, by spraying gas on the object (W); an actuator (3) which varies the position of the pressing member (1); a pressure sensor (4) which detects the pressure of the gas; a gap sensor (5) which detects the floating amount from the pressing member (1) of the object (W); and a control unit (6) which controls the actuator (3) on the basis of the detected value of the pressure sensor (4) and the detected value of the gap sensor (5). |
