CLAMP WITH ELECTRODE CARRIER DISK

摘要

A holding apparatus (100) designed to electrostatically hold a component (1), e.g., a silicon wafer, includes a base body (10) produced from at least one plate (11, 12), a plurality of projecting burls (14) arranged on an upper side (13) of the base body (10) and form a support for component (1), and an electrode device (20) having a plurality of electrodes (21) arranged on the upper side (13) in gaps between burls (14), wherein the electrode device (20) comprises a silicon carrier disk (22) having a plurality of holes (23), and the carrier disk (22) is arranged on the upper side (13) in such a manner that the burls (14) project through the holes (23) and are spaced apart from the carrier disk (22), and wherein the electrodes (21) are arranged on disk portions between the holes (23). A method for producing the holding apparatus (100) is also described.

主权项

1. A holding apparatus configured to electrostatically hold a component, comprising:
a base body which comprises at least one plate, a plurality of projecting burls which are arranged on an upper side of the base body and form a support for the component, and an electrode device having a plurality of electrodes which are arranged on the upper side of the base body in gaps between the burls, wherein the electrode device comprises a silicon carrier disk having a plurality of holes, the carrier disk is arranged on the upper side of the base body in such a manner that the burls project through the holes and are spaced apart from the carrier disk, and the electrodes are arranged on disk portions between the holes.