DIAMOND ELECTRODE AND METHOD OF MANUFACTURING THE SAME

摘要

Disclosed are a method of manufacturing a diamond electrode by a chemical vapor deposition (CVD) process, and a diamond electrode manufactured by the method. The method of manufacturing the diamond electrode includes: introducing a carbon source gas to form niobium carbide (NbC) on a niobium substrate, immediately before depositing an electrically conductive diamond layer on the substrate by a hot-filament chemical vapor deposition (HFCVD) process; and depositing electrically conductive diamond layers on the substrate by two or more separate processes. Accordingly, a pinhole present during deposition of the electrically conductive diamond layer is filled such that the contact between an electrolyte and the substrate in an electrolytic environment will be minimized so as to retard the corrosion of the substrate, thereby providing a diamond electrode having a long life span.

主权项

1. A method of manufacturing a diamond electrode, the method comprising:
forming a carbide layer on a surface of a substrate by introducing hydrogen and a carbon source gas into a chamber; and forming electrically conductive diamond layers on the substrate by at least two separate processes while controlling a size of diamond crystals, which are deposited on the substrate, by controlling a ratio of hydrogen gas, carbon source gas and boron source gas that are introduced into the chamber.