| 摘要 |
The objective of the present invention is to provide a coating device with which it is possible to take out imprint material that contains a foreign substance from a container of the coating device and to supply new imprint material to the container of the coating device. This coating device is a coating device (13) used for supplying imprint material on a substrate in an imprint device that forms patterns on the imprint material on the substrate using a mold, wherein the coating device (13) is characterized by having a housing unit (8) for housing the imprint material, and a discharging unit (7) for discharging the imprint material of the housing unit on the substrate, said discharging unit (7) being provided inside the housing unit, and it being possible for the coating device (13) to be attached to or detached from the imprint device. |
