| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an MEMS structure which reduces the occurrence of sticking, and to provide the MEMS structure.SOLUTION: A manufacturing method of an MEMS structure 1 includes: a preparation step where a substrate 2, on which a fixed electrode 31 and a sacrifice layer 90 disposed on the fixed electrode 31 are arranged, is prepared; a formation step where a movable part 323 forming a part of a movable electrode 32 is formed on the sacrifice layer 90 and support beam parts 71, 72 connected with the movable part 323 are formed on the substrate 2; a removal step where the sacrifice layer 90 is removed; and a cutting step where the movable part 323 and the support beam parts 71, 72 are cut by electric action. |
