| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing method sufficient for the compensation of a wavefront aberration and high in a process tolerance.SOLUTION: A laser processing method comprises a first setting step, a first measurement step, a first data storage step, a processing preparation step and a first laser working step. In the first setting step, a galvano-scanner is so set in a first step as to reflect a laser beam in a first direction. A first measurement step measures a laser beam having passed an adaptive mirror, a galvano-scanner, an f&thetas; lens and a reflection mirror. At the first data storage step, a first shape of the adaptive mirror is specified on the basis of the measurement result at the first measurement step. At the first laser working step, the galvano scanner is set in a first state, and the adaptive mirror is deformed into a first shape so that the working member is irradiated with the laser beam. |
