CREATING A SUB-MICRON PATTERN PROXIMATE A NEAR-FIELD TRANSDUCER USING IN-SLIDER WAVEGUIDE AND LASER

摘要

An air-bearing surface of a slider is coated with a photoresist having a high optical absorbance at or near an operational wavelength of the slider. Light is directed at a target wavelength through an entry of a waveguide integrated into the slider. The light exiting the waveguide forms a feature through the photoresist, the feature proximate a near-field transducer of the slider. A sub-micron pattern is formed using the feature.

主权项

1. A method, comprising:
coating an air-bearing surface of a slider with a photoresist having high optical absorbance at or near an operational wavelength of the slider; directing light at a target wavelength through an entry of a waveguide integrated into the slider, wherein the light exiting the waveguide forms a feature through the photoresist, the feature proximate a near-field transducer of the slider; and forming a sub-micron pattern using the feature.