发明名称 |
PERFORMANCE OPTIMIZATION OF A DIFFERENTIAL CAPACITANCE BASED MOTION SENSOR |
摘要 |
A system includes a capacitance sensor having an inertial proof mass disposed between a first electrode structure and a second electrode structure. A switching system is switchable between providing one of a positive charge pulse and a negative charge pulse to one of the first electrode structure and the second electrode structure. A controller controls the switching of the switching circuit to provide one of the positive charge pulse or the negative charge pulse to the first electrode structure during a first portion of a charge cycle time period and to provide an opposite polarity charge pulse from that provided to the first electrode structure to the second electrode structure during a second portion of the charge cycle time period to generate an error signal with respect to the inertial proof mass of the capacitance sensor. |
申请公布号 |
US2015346236(A1) |
申请公布日期 |
2015.12.03 |
申请号 |
US201414295063 |
申请日期 |
2014.06.03 |
申请人 |
FLAMM JUERGEN KARL PETER;Douglass John T.;Card, JR. Richard P. |
发明人 |
FLAMM JUERGEN KARL PETER;Douglass John T.;Card, JR. Richard P. |
分类号 |
G01P15/125;G01P15/13 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
1. A system comprising:
a capacitance sensor having an inertial proof mass disposed between a first electrode structure and a second electrode structure; a switching system switchable between providing one of a positive charge pulse and a negative charge pulse to one of the first electrode structure and the second electrode structure; and a controller that controls the switching of the switching circuit to provide one of the positive charge pulse or the negative charge pulse to the first electrode structure during a first portion of a charge cycle time period and to provide an opposite polarity charge pulse from that provided to the first electrode structure to the second electrode structure during a second portion of the charge cycle time period to generate an error signal with respect to the inertial proof mass of the capacitance sensor. |
地址 |
WOODLAND HILLS CA US |