SEMICONDUCTOR DEVICE INCLUDING DIFFERENT ORIENTATIONS OF MEMORY CELL ARRAY AND PERIPHERAL CIRCUIT TRANSISTORS

摘要

A memory device includes a memory cell on a first region of a substrate. An active region is in a second region neighboring the first region of the substrate, and an extension direction of the active region has an acute angle with the <110> direction of the substrate. A transistor serving as a peripheral circuit is on the second region of the substrate. In the memory device, defects or failures due to a crystal defects or a dislocation of the substrate may decrease.

主权项

1. A semiconductor device, comprising:
a semiconductor substrate comprising a <110> direction; a memory cell on a first region of the substrate; an active region in a second region neighboring the first region of the substrate, an extension direction of the active region having an acute angle with the <110> direction of the substrate; and a transistor serving as a peripheral circuit on the second region of the substrate.