OPTICAL FILTER INCLUDING A STEP SECTION, AND ANALYTICAL INSTRUMENT AND OPTICAL APPARATUS USING THE OPTICAL FILTER

摘要

An optical filter includes a first substrate, a second substrate that is opposed to the first substrate, a first reflecting section that is disposed between the first substrate and the second substrate, a second reflecting section that is disposed between the first reflection section and the second substrate, a first gap existing between the first reflecting section and the second reflecting section, a first electrode that is disposed between the first substrate and the second substrate, a second electrode that is disposed between the first electrode and the second substrate, a second gap existing between the first electrode and the second electrode, and a third electrode that is disposed between the first substrate and the second electrode. The second gap is larger than the first gap.

主权项

1. A driving method of an optical filter, the optical filter including a first reflecting section and a second reflection section, the method comprising:
applying a first voltage between a first electrode and a second electrode; and applying a second voltage between a third electrode and the second electrode.