发明名称 |
DEVICE FOR DETECTING PARTICLES IN A LIQUID AND METHOD FOR DETECTING PARTICLES IN A LIQUID |
摘要 |
A device, which detects particles in a liquid, includes: a flow cell through which a liquid flows; a light source that illuminates the flow cell with an inspection beam; a scattered light detector that detects scattered light that is produced in a region illuminated by the inspection beam; and an evaluating portion that evaluates that a particle is included in the liquid when the scattered light is detected for less than a prescribed time and evaluates that the flow cell is not filled with the liquid when the scattered light is detected for more than a prescribed time. |
申请公布号 |
US2015346091(A1) |
申请公布日期 |
2015.12.03 |
申请号 |
US201514723543 |
申请日期 |
2015.05.28 |
申请人 |
Azbil Corporation |
发明人 |
OBARA Daisuke;FURUYA Masashi |
分类号 |
G01N21/53;G01N21/51;G01N21/05 |
主分类号 |
G01N21/53 |
代理机构 |
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代理人 |
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主权项 |
1. A device for detecting particles in a liquid, comprising:
a flow cell through which a liquid flows; a light source that illuminates the flow cell with an inspection beam; a scattered light detector that detects scattered light that is produced in a region illuminated by the inspection beam; and an evaluating portion that evaluates that a particle is included in the liquid when the scattered light is detected for less than a prescribed time and evaluates that the flow cell is not filled with the liquid when the scattered light is detected for more than a prescribed time. |
地址 |
Tokyo JP |