发明名称 DEVICE FOR DETECTING PARTICLES IN A LIQUID AND METHOD FOR DETECTING PARTICLES IN A LIQUID
摘要 A device, which detects particles in a liquid, includes: a flow cell through which a liquid flows; a light source that illuminates the flow cell with an inspection beam; a scattered light detector that detects scattered light that is produced in a region illuminated by the inspection beam; and an evaluating portion that evaluates that a particle is included in the liquid when the scattered light is detected for less than a prescribed time and evaluates that the flow cell is not filled with the liquid when the scattered light is detected for more than a prescribed time.
申请公布号 US2015346091(A1) 申请公布日期 2015.12.03
申请号 US201514723543 申请日期 2015.05.28
申请人 Azbil Corporation 发明人 OBARA Daisuke;FURUYA Masashi
分类号 G01N21/53;G01N21/51;G01N21/05 主分类号 G01N21/53
代理机构 代理人
主权项 1. A device for detecting particles in a liquid, comprising: a flow cell through which a liquid flows; a light source that illuminates the flow cell with an inspection beam; a scattered light detector that detects scattered light that is produced in a region illuminated by the inspection beam; and an evaluating portion that evaluates that a particle is included in the liquid when the scattered light is detected for less than a prescribed time and evaluates that the flow cell is not filled with the liquid when the scattered light is detected for more than a prescribed time.
地址 Tokyo JP