发明名称 |
INSPECTION APPARATUS USING POLARIZED LIGHTS |
摘要 |
An inspection apparatus using polarized lights according to one aspect of the present invention includes an irradiator configured to irradiate an inspection target with a first plurality of lights. The first plurality of lights have different polarization states and different wavelengths from each other. The inspection apparatus further includes a light receiver configured to perform a wavelength demultiplexing of a second plurality of lights obtained from the inspection target to generate a third plurality of lights, to separately receive the third plurality of lights, and to output at least one light-receiving signal associated with the second plurality of lights and a processor configured to calculate at least one of an ellipse azimuth, a degree of polarization, and a polarization component intensity using the light-receiving signal and to determine whether the inspection target is defective or non-defective. |
申请公布号 |
US2015346083(A1) |
申请公布日期 |
2015.12.03 |
申请号 |
US201514724932 |
申请日期 |
2015.05.29 |
申请人 |
YOKOGAWA ELECTRIC CORPORATION |
发明人 |
MATSUMOTO Yoshinori;TSUBOTA Takashi;HAMAGUCHI Toyoaki;ITO Akishige |
分类号 |
G01N21/21;G01N21/88 |
主分类号 |
G01N21/21 |
代理机构 |
|
代理人 |
|
主权项 |
1. An inspection apparatus using polarized lights comprising:
an irradiator configured to irradiate an inspection target with a first plurality of lights, the first plurality of lights having different polarization states and different wavelengths from each other; a light receiver configured to perform a wavelength demultiplexing of a second plurality of lights obtained from the inspection target to generate a third plurality of lights, to separately receive the third plurality of lights, and to output at least one light-receiving signal associated with the second plurality of lights; and a processor configured to calculate at least one of an ellipse azimuth, a degree of polarization, and a polarization component intensity using the light-receiving signal and to determine whether the inspection target is defective or non-defective. |
地址 |
Tokyo JP |