发明名称 Semiconductor Device and Display Device Including the Same
摘要 Provided is a transistor which includes an oxide semiconductor film in a channel region. A change from a shift value before light irradiation to a shift value under light irradiation is greater than or equal to −1 V and less than or equal to 0.5 V, where the shift value is a gate voltage at a point of intersection of an axis of 1×10−12 A and a steepest tangent line of the logarithm of a drain current in drain current-gate voltage characteristics of the transistor, and where the light irradiation is performed on the oxide semiconductor film with light having an energy greater than or equal to a band gap of the oxide semiconductor film.
申请公布号 US2015348998(A1) 申请公布日期 2015.12.03
申请号 US201514721362 申请日期 2015.05.26
申请人 Semiconductor Energy Laboratory Co., Ltd. 发明人 Koezuka Junichi;JINTYOU Masami;KUROSAKI Daisuke;SHIMA Yukinori;OBONAI Toshimitsu
分类号 H01L27/12;H01L21/44 主分类号 H01L27/12
代理机构 代理人
主权项 1. A semiconductor device comprising: a transistor comprising an oxide semiconductor film in a channel region, wherein a change from a shift value before light irradiation to a shift value under light irradiation is greater than or equal to −1 V and less than or equal to 0.5 V, where the shift value is a gate voltage of the transistor at a point of intersection of an axis of 1×10−12 A and a steepest tangent line of a logarithm of a drain current in drain current-gate voltage characteristics of the transistor, and where the light irradiation is performed on the oxide semiconductor film with light having an energy greater than or equal to a band gap of the oxide semiconductor film.
地址 Kanagawa-ken JP