APPLICATION DEVICE, IMPRINTING APPARATUS, AND METHOD FOR MANUFACTURING OBJECT

摘要

Provided is an application device capable of extracting an imprinting material in which impurities are mixed from a container of the application device and supplying new imprinting material to the container of the application device.;An application device according to the present disclosure is used to supply an imprinting material to a substrate in an imprinting apparatus that forms a pattern on the imprinting material on the substrate by using a mold. The application device includes a container unit that contains the imprinting material, and an ejecting unit that is provided on the container unit and that ejects the imprinting material contained in the container unit toward the substrate. The application device is detachably attachable to the imprinting apparatus.

主权项

1. An application device to supply an imprinting material to a substrate in an imprinting apparatus that forms a pattern on the imprinting material on the substrate by using a mold, the application device comprising:
a container unit that contains the imprinting material; and an ejecting unit that is provided on the container unit and that ejects the imprinting material contained in the container unit toward the substrate, wherein the application device is detachably attachable to the imprinting apparatus.