| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma generator and a plasma generation method capable of irradiating a wide region directly with thermal plasma, with a simple configuration.SOLUTION: Plasma generation gas is injected from a plasma generation gas injection port 4 into a gas circulation tube 2 having a shape where a pair of opening ends are formed by cutting away a portion of an annular loop tube surrounding the central axis C, and induction heat plasma is generated in the gas circulation tube 2 by supplying high frequency power from a high frequency power supply 6 to an air-core coil 3 having a pair of windings 31, 32 wound around the central axis C, respectively, and holding the gas circulation tube 2 therebetween, and forming an electric field between a pair of windings 31, 32, and a magnetic field along the central axis C. The induction heat plasma is emitted from the pair of opening ends of the gas circulation tube 2 into a vacuum chamber 1. |
