| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump device including shaft seal parts that can improve shaft seal performance while having a simple structure with no need for high machining accuracy.SOLUTION: A vacuum pump device according to the present invention comprises: a pair of pump rotors 11e; a pair of rotating shafts 12 to which the pair of pump rotors 11e are attached respectively; bearings that rotatably support the pair of rotating shafts 12; and shaft seal parts arranged between the pump rotors 11e and the bearings. The shaft seal parts comprise: block members 81 including inner peripheral surfaces opposed to outer peripheral surfaces of the rotating shafts 12; annular grooves 83 opposed to the inner peripheral surfaces of the block members 81 and provided in the outer peripheral surfaces of the rotating shafts; and purge gas flow passages 81a provided in the block members to introduce purge gas. The annular grooves 83 are connected to the purge gas flow passages 81a. |
