| 发明名称 |
OXIDE SINTERED BODY AND SEMICONDUCTOR DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxide sintered body capable of sustaining stable sputtering discharge while containing Sn.SOLUTION: An oxide sintered body comprises In, Ga, Zn and Sn, and comprises at least one of InGaSnOcrystal phase and InGaZnOcrystal phase. |
| 申请公布号 |
JP2015214429(A) |
申请公布日期 |
2015.12.03 |
| 申请号 |
JP20140096880 |
申请日期 |
2014.05.08 |
| 申请人 |
SUMITOMO ELECTRIC IND LTD |
发明人 |
MIYANAGA YOSHINORI;WATAYA KENICHI;KURISU KENICHI |
| 分类号 |
C04B35/00;C23C14/08;C23C14/34;H01L21/363;H01L29/786 |
主分类号 |
C04B35/00 |
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