ROBUST DIAPHRAGM FOR AN ACOUSTIC DEVICE

摘要

A rigid, flat plate diaphragm for an acoustic device is illustrated. The internal supporting structure of the diaphragm provides a combination of torsional and translational stiffeners, which resemble a number of crossbars. These stiffeners brace and support the diaphragm motion, thus causing its response to not be adversely affected by fabrication stresses and causing it to be very similar in dynamic response to an ideal flat plate operating in a frequency range that extends well beyond the audible.

主权项

1. A microphone, comprising:
a substrate defining a backspace; an acoustic diaphragm comprising:
a peripheral edge free to move with respect to the substrate; andtorsional and translational stiffeners distributed on at least one surface of the acoustic diaphragm, the torsional and translational stiffeners rigidizing the acoustic diaphragm to resist buckling warpage; and at least one support configured to suspend the acoustic diaphragm for vibrational movement over the backspace, the acoustic diaphragm, the at least one support and the backspace plate, being configured to provide:
a resonant frequency of vibrations within the acoustic diaphragm above an audible range, anda resonant frequency of the vibrational movement of the acoustic diaphragm over the backspace within an audible range, substantially independent of the resonant frequency of vibrations within the acoustic diaphragm.