POROUS BARRIER FOR EVENLY DISTRIBUTED PURGE GAS IN A MICROENVIRONMENT

摘要

An improved system and method for purging a microenvironment to desired levels of relative humidity, oxygen, or particulates through the implementation of a purge gas delivery apparatus and method that provides even distribution of the purging gas within the microenvironment. A substrate container has a tower therein with a fluid flow passageway extending the length of the tower. Apertures with porous media between the aperture and fluid flow passageway regulate the volume and pressure of air discharging at each aperture. Alternatively, the tower may be formed of a porous tubular polymeric material. A sleeve may direct the discharge purge gas in the interior.

主权项

1. A system for transporting substrates comprising:
a substrate container having a container portion with an opening for loading/unloading substrates, a door adapted to sealably cover the opening;
a substrate carrying section disposed in the transport container; an apparatus comprising an inlet tower adapted to be mounted to substrate container portion for admitting a gaseous working fluid to the interior of the container for purging the substrate container body with the gaseous working fluid; the inlet tower having a length and one or more outlet regions arranged along the length of the tower, and an interior flow passageway extending the length of the tower, filter media positioned at each outlet region intermediate the one or more outlet regions and the interior flow passageway whereby the gaseous working fluid being admitted to the substrate container may be filtered and the gaseous fluid.