| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enable downsizing of a pressure sensor. <P>SOLUTION: The manufacturing method of the pressure sensor includes the steps of: (a) forming a first membrane on a part of a surface of a substrate; (b) forming a second membrane lying on the first membrane and a region of the substrate, surrounding the first membrane; (c) exposing a part of the first membrane by forming a through hole in the second membrane; (d) etching the first membrane; (e) sealing the through hole of the second membrane; and (f) forming a strain sensor membrane on the second membrane located on the region of the substrate, where the first membrane is etched. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
