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发明名称
スーパージャンクションパワー半導体デバイス
摘要
<p>A superjunction power semiconductor device which includes spaced drift regions each extending from the bottom of a respective gate trench to the substrate of the device.</p>
申请公布号
JP5827785(B2)
申请公布日期
2015.12.02
申请号
JP20090547212
申请日期
2007.04.13
申请人
シリコニクス テクノロジー シー.ブイ.
发明人
キンザー、ダニエル エム.
分类号
H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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