发明名称 ポリシロキサン縮合物を含有する絶縁材料及び該絶縁材料を用いた硬化膜の製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an insulating material which is useful for a semiconductor device and contains a reduced amount of volatile components to avoid generation of dust during heat curing. <P>SOLUTION: An insulating material contains a curable component (A) containing a polysiloxane condensate having a polycondensation structure site derived from a silane compound represented by a general formula (1): R<SP POS="POST">1</SP><SB POS="POST">n</SB>SiX<SP POS="POST">1</SP><SB POS="POST">4-n</SB>, where R<SP POS="POST">1</SP>is a hydrogen atom or a C1-C10 hydrocarbon group, X<SP POS="POST">1</SP>is a halogen atom, a C1-C6 alkoxy group or an acetoxy group, if there are multiple kinds of R<SP POS="POST">1</SP>and X<SP POS="POST">1</SP>, they are each independent, and n is an integer from 0 to 3. The insulating material also contains a C1-C20 nitrogen-containing compound (B) of 16 to 50,000 mass ppm inclusive. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5826012(B2) 申请公布日期 2015.12.02
申请号 JP20110270351 申请日期 2011.12.09
申请人 旭化成イーマテリアルズ株式会社 发明人 佐伯 友之;野口 貴子;笹野 大輔
分类号 H01L21/316;C08K3/22;C08K5/00;C08L83/04 主分类号 H01L21/316
代理机构 代理人
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