| 摘要 |
<p>The invention provides a defect inspection device and a defect inspection method which can distinguish surface defects and inlayer effects with high speed and low cost. The defect inspection device is provided with a first irradiation unit used for irradiating a first light on an object to be detected from a first side; a second irradiation unit used for irradiating a second light on an object to be detected from a second side; a shooting unit configured on the side to obtain shooting data corresponding with the intensity of reflective light of the first light and penetrating light of the second light; and a detection unit used for detecting inlayer effects of the object to be detected based on reflective light and penetrating light obtained by the shooting unit. The detection unit determines the defects with the intensity of penetrating light larger than the reflective light to be inlayer infects. The penetrating light detection method can employ the second light obliquely inserted to detect indirect penetrating light and a cross-nicol mode to detect positive penetrating light. The shooting unit can employ two cameras and one color camera by using two lights in different corlors.</p> |
