| 摘要 |
The objective of the present invention is to provide a plasma generating device which generates electromagnetic wave plasma by the radiation of electromagnetic waves, and with which multiple power supplies, complex systems and the like are unnecessary, the amount of power required is reduced, and the generation, expansion, and maintenance of plasma are efficiently carried out. The present invention is a plasma generating device provided with an electromagnetic wave oscillator that emits electromagnetic waves, and a control device that controls the electromagnetic wave oscillator, said plasma generating device being characterized by being provided with a step-up circuit that causes the electromagnetic waves that have been emitted from the electromagnetic wave oscillator to resonate, thereby generating a high voltage, and a discharge electrode that discharges the high voltage generated by the step-up circuit. |
