液体噴射ヘッド、液体噴射装置、圧電素子及び圧電センサー

摘要

A piezoelectric element comprises a silicon oxide layer, an intermediate layer provided above the silicon oxide layer, a first electrode provided above the intermediate layer, a piezoelectric layer provided above the intermediate layer, and a second electrode provided above the piezoelectric layer. The piezoelectric layer is configured of a complex oxide having a perovskite structure and containing at least bismuth and iron. The intermediate layer contains magnesium oxide and/or aluminum oxide.