LIGHT-TRANSMITTING IMPRINTING MOLD AND METHOD FOR MANUFACTURING LARGE-AREA MOLD

摘要

An imprint method including the steps of: an exposing step to irradiate a photo curing resin, coated on a large-area substrate, with a curing light while the light-transmitting imprint mold is pressed against the photo curing resin, an amount of the curing light applied onto the photo curing resin in a light shielding region provided with the light shielding member (5) made less than an amount of the curing light applied onto the photo curing resin in a light transmitting region of the mold so that a portion of the photo curing resin in the light shielding region is semi-cured by the use of the light shielding member (5) provided so as to reproduce the concave-convex pattern of the transparent substrate; a separating step to separate the mold from the photo curing resin after the exposing step; a moving step to move the mold so that an end of the light transmitting region of the mold is positioned on the semi-cured portion (9b) of the photo curing resin; and a repeating step to repeat the exposing step and the separating step with the mold positioned at a position after the moving step.