VISION INSPECTION APPARATUS AND METHOD THEREOF

摘要

A vision inspection device is disclosed. The vision inspection device according to the present invention comprises: multiple lines for loading and transferring multiple substrate groups; an inspection tool for inspecting one or more substrate groups while moving between the multiple lines; and a control part for loading any one among the multiple substrate groups on any one among the multiple lines and loading another among the multiple substrate groups on another among the multiple lines, wherein the multiple substrate groups are sequentially loaded on the multiple lines so that the inspection of the said another substrate group loaded on the said another line can be started when the inspection of the said one substrate group loaded on the said one line is finished. Therefore, vision inspection can be conducted at high speed.