A FLEXURE-BASED MONOLITHIC PARALLEL STAGE FOR TWO AXES DRIVEN BY DIFFERENTIAL FORCES

摘要

The present invention relates to a flexure-based monolithic parallel stage for two axes driven by differential forces. Piezoelectric drive parts, which are driven by a piezoelectric actuator, are arranged on four surfaces of a moving part, and each of the piezoelectric drive part is coupled and connected to a base through elastic hinges, thereby allowing the starting point of the moving part to be in the center and allowing the moving part to move in two axial directions (X, Y directions) by differential forces, which are the gravitational difference between the piezoelectric drive parts.