发明名称 半導体接合保護用ガラス組成物の製造方法、半導体装置の製造方法及び半導体装置
摘要 Provided is a glass composition for protecting a semiconductor junction which contains at least SiO 2 , B 2 O 3 , Al 2 O 3 , ZnO and at least two oxides of alkaline earth metals selected from a group consisting of CaO, MgO and BaO, and substantially contains none of Pb, As, Sb, Li, Na and K, wherein an average linear expansion coefficient within a temperature range of 50°C to 550°C falls within a range of 3.33×10 -6 to 4.13×10 -6 . A semiconductor device having high breakdown strength can be manufactured using such a glass material containing no lead in the same manner as a conventional case where "a glass material containing lead silicate as a main component" is used.
申请公布号 JP5827398(B2) 申请公布日期 2015.12.02
申请号 JP20140514287 申请日期 2012.05.08
申请人 新電元工業株式会社 发明人 六鎗 広野;伊東 浩二;小笠原 淳;伊藤 一彦
分类号 H01L21/316;H01L21/329;H01L23/00;H01L29/861;H01L29/868 主分类号 H01L21/316
代理机构 代理人
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