| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a joined body connected with good adhesion using a pair of substrates one of which has high surface roughness. <P>SOLUTION: The joined body 100 comprises: a first substrate 1; a second substrate 2; and a polysilsesquioxane film 3 and a polyorganosiloxane film 4 disposed between the first substrate 1 and the second substrate 2. The first substrate 1 and the second substrate 2 are connected through the two layers. After energy is given to the polysilsesquioxane film 3 and the polyorganosiloxane film 4, the first substrate 1 and the second substrate 2 are connected. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
