| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an analytical method capable of stably analysing the concentration of siloxane which is an impurity in a silicon compound gas with high sensitivity compared to conventional analytical methods without requiring complex procedures and preparations. <P>SOLUTION: In a concentration analytical method for an impurity in a silicon compound gas, when the concentration of the impurity in the silicon compound gas having a Si-H bond in a molecular structure is analysed by using a gas chromatography-mass spectrometer (GC-MS), a separation column made by the combination of a packed column and a capillary column is used. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
