| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a package capable of preventing a foreign substance such as dust from adhering to a pellicle stored in a pellicle-stored case during transportation of the pellicle. <P>SOLUTION: In the package of the pellicle-storing case containing a packing box and a cushioning material protecting the pellicle-storing case stored in the packing box in the packing box, the cushioning material has an extensible and contractible support film supporting the upper surface or the bottom surface of the pellicle-storing case a frame body over which the support film is spread, and a lateral gap control mechanism controlling a movement of the pellicle-storing case in a side surface direction. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
