发明名称 EXPOSURE DEVICE
摘要 The purpose of the present invention is to provide a roll-to-roll-type apparatus which can reduce tact time without generating a scratch on a long work and has appropriate joining precision of a formed pattern. The provide a roll-to-roll-type exposure apparatus includes: a light exposure stage (31) for storing and maintaining the long work (W); a stage transfer unit (32) for reciprocating the light exposure stage (31); a supply side holding roller (15), arranged on a downstream side of a supply reel (11) and an upstream side of the light exposure means (51), for holding the long work (W); and a winding side holding roller (25), arranged on a downstream side of the light exposure means (51) and an upstream side of a winding reel (21), for holding the long work (W). At least one side of the supply side holding roller (15) and the winding side holding roller (25) has a roller driving means.
申请公布号 KR20150135094(A) 申请公布日期 2015.12.02
申请号 KR20150067909 申请日期 2015.05.15
申请人 ORC MANUFACTURING CO., LTD. 发明人 MORITA AKIRA;MATSUDA MASAAKI;MIDORIKAWA SATORU
分类号 G03F7/20;G03F7/24 主分类号 G03F7/20
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