| 发明名称 | Imaging optics | ||
| 摘要 | An imaging optics includes a plurality of mirrors which reflect imaging light to image an object field in an object plane into an image field in an image plane. A mirror body of at least one of the mirrors has a through-opening for the imaging light to pass through. The through-opening has an internal region of a smallest opening width in the mirror body. The through-opening expands from the internal region towards both edge regions of the mirror body. A disturbing influence of unused light portions is reduced or eliminated completely. | ||
| 申请公布号 | US9201226(B2) | 申请公布日期 | 2015.12.01 |
| 申请号 | US201213438591 | 申请日期 | 2012.04.03 |
| 申请人 | Carl Zeiss SMT GmbH | 发明人 | Loering Ulrich;Mueller Ralf;Mann Hans-Juergen;Baer Norman |
| 分类号 | G03B27/54;G02B17/06;G02B5/00;G02B27/00;G03F7/20 | 主分类号 | G03B27/54 |
| 代理机构 | Fish & Richardson P.C. | 代理人 | Fish & Richardson P.C. |
| 主权项 | 1. An imaging optics, comprising: a plurality of mirrors comprising a mirror including a mirror body having an opening surrounded by a reflection surface; and an auxiliary device, wherein: the plurality of mirrors is configured to reflect light along a beam path to image an object field in an object plane into an image field in an image plane;the beam path of the light includes a pupil obscuration;the opening of the mirror body of the mirror having a through-opening portion and an assembly opening portion;the through-opening portion is configured so that, during use of the imaging optics, the through-opening portion allows the light to pass therethrough; andthe auxiliary device is in the assembly opening portion. | ||
| 地址 | Oberkochen DE | ||