Processing system and processing method

摘要

According to one embodiment, a processing system includes a storage section, a processing section, a mounting section, a first transport section, and a second transport section. The mounting section includes a plurality of holding sections with a first spacing in a stacking direction. The first transport section is configured to transport the workpiece between the storage section and the mounting section and to enter the mounting section at a first position in the stacking direction. The second transport section is configured to transport the workpiece between the processing section and the mounting section and to enter the mounting section at a second position different from the first position in the stacking direction. The first position is provided at two sites in the stacking direction across the second position. The first transport section and the second transport section are enabled to enter the mounting section around a same time.

主权项

1. A processing system comprising:
a storage section configured to store a workpiece; a processing section configured to perform processing on the workpiece; a mounting section including a plurality of holding sections with a first spacing in a stacking direction, one of the plurality of the holding sections being configured to mount the workpiece; a first transport section configured to:
transport the workpiece between the storage section and the mounting section; andenter the mounting section at a first position in the stacking direction; and a second transport section having two grasping sections stacked in the stacking direction, the two grasping sections moving vertically in opposite directions, the second transport section being configured to transport the workpiece between the processing section and the mounting section, and the two grasping sections entering the mounting section at a second position different from the first position in the stacking direction, wherein
the first position is provided at two sites in the stacking direction across the second position,the first transport section and the second transport section are enabled to enter the mounting section around a same time, andone of the two grasping sections is moved down to mount the workpiece on the holding section, and another one of the two grasping sections is moved up for receiving another workpiece on another holding section.