Metal filling apparatus

摘要

A metal filling apparatus minimizes the thickness of excess metal formed on an object and fills molten metal into a minute space to have an opening on the object. A table holds a semiconductor wafer, piston has a pressure portion on a side facing the table, and a pressing mechanism engages the piston onto the wafer, and an airtight chamber is formed by the wafer on the table, housing, and piston. A mechanism reduces pressure inside the chamber by exhausting gas, a mechanism supplies molten metal to the chamber, and a mechanism supplies an inert gas into the chamber.

主权项

1. Apparatus for filling a molten metal into a minute space formed on a surface of an object to be processed, the minute space having an opening on said surface, the molten metal being supplied onto the object to be processed,
the metal filling apparatus comprising:
a holder holding the object to be processed;a cylindrical member having an inner space and having open ends at both ends thereof, the cylindrical member being provided to have one end facing the holder;a piston fitted into the inner space of the cylindrical member from one of the open ends to be movable in a forward and backward direction;a first actuator configured to move the piston an axial direction thereof; anda second actuator connected to at least one of the holder and the cylindrical member and configured to apply a power to the at least one of the holder and the cylindrical member so that the holder and the cylindrical member move relative to one another in approaching and separating directions, the cylindrical member and the holder being brought into contact with each other in an unengaged manner or being caused to hold the object to be processed between them by driving the second actuator to move the cylindrical member and the holder relative to one another, so as to form an airtight processing chamber, the airtight processing chamber being formed by the object to be processed held by the holder or the holder, the cylindrical member and the piston, the metal filling apparatus further comprising:
an exhaust pump reducing a pressure inside the processing chamber;a molten metal supply fluidly communicating with the processing chamber; anda pressure source fluidly communicating with the processing chamber to pressurize the molten metal supplied into the processing chamber, the first actuator being configured to move the piston in the forward and backward direction with respect to the object to be processed held by the holder, and when moving the piston forward, move the piston forward until the piston is brought into contact with the object to be processed, and the capacity of the processing chamber being changed in accordance with the position of the piston in the forward and backward direction.