Diffraction-based sensing of mirror position

摘要

Scanning apparatus includes a transmitter, which is configured to emit a beam comprising pulses of light, and a scanning mirror, which is configured to scan the beam over a scene. A receiver is configured to receive the light reflected from the scene and to generate an output indicative of the pulses returned from the scene. A grating is formed on an optical surface in the apparatus and is configured to diffract a portion of the beam at a predetermined angle, so as to cause the diffracted portion to be returned from the scanning mirror to the receiver. A controller is coupled to process the output of the receiver so as to detect the diffracted portion and to monitor a scan of the mirror responsively thereto.

主权项

1. Scanning apparatus, comprising:
a transmitter, which is configured to emit a beam comprising pulses of light; a scanning mirror, which is configured to scan the beam over a scene; a receiver, which is configured to receive the light reflected from the scene and to generate an output indicative of the pulses returned from the scene; a grating, which is formed on an optical surface in the apparatus and is configured to diffract a portion of the beam at a predetermined angle, so as to cause the diffracted portion to be returned from the scanning mirror to the receiver; and a controller, which is coupled to process the output of the receiver so as to detect the diffracted portion and to monitor a scan of the mirror responsively thereto.