| 摘要 |
The present invention relates to a rotation support for a substrate spinning device. The rotation support for the substrate spinning device, horizontally rotating a substrate of a disc shape, includes: a rotation shaft rotating by being stretched in a vertical direction; a connection bolt rotating with the rotation shaft by being coupled to the upper end of the rotation shaft in the vertical direction and having an expanded diameter unit formed on the bottom of a head unit, wherein the diameter of the expanded diameter unit becomes wider from the head unit toward the lower side; a rotation body rotating with the rotation shaft by being fixed by the connection bolt and having a groove unit of a ring shape, wherein the groove unit accommodates the edge of the substrate; and an O-ring located on the bottom of the head unit while being inserted into the expanded diameter unit of the connection bolt. The each rotation body is accurately fixed to the rotation shaft in a predetermined posture at each rotation support of the spring device, so the rotation support for the substrate spinning device can reliably prevent the groove unit from being vertically moved while the rotation body rotates, thereby maintaining a circular substrate in a horizontal state while the circular substrate rotated and supported by the substrate spinning device rotates. |
