Method of manufacturing a vibratory actuator for a touch panel with haptic feedback

摘要

The disclosure relates to a method of manufacturing vibratory elements, comprising forming on a substrate a multilayer structure by an integrated circuit manufacturing method, the multilayer structure comprising an element susceptible of vibrating when it is subjected to an electrical signal, and electrodes for transmitting an electrical signal to the vibratory element, the vibratory element comprising a mechanical coupling face that is able to transmit to control element vibrations perceptible by a user.

主权项

1. A method, comprising:
forming a first multilayer structure on a substrate having semiconductor material, the forming of the first multilayer structure including:
forming on a first surface of the substrate a first electrode;forming on the first electrode a first vibratory element configured to vibrate in response to a first electrical signal;coupling the first vibratory element to a first plate to vibrate the first plate as the first vibratory element vibrates;forming a second electrode having first and second portions, the first vibratory element being positioned between the first portion and the first electrode, the second portion being formed on the first surface of the substrate and being coplanar with the first electrode, the first and second electrodes being configured to transmit the first electrical signal to the first vibratory element;forming first and second vias through the semiconductor material of the substrate; andelectrically coupling the first and second electrodes to a second surface of the substrate though the first and second vias, respectively.